Chinese researchers have unveiled a new “fancy tool” that can pinpoint the source of manufacturing flaws during microchip production. According to the team, the new technology can cut errors by as ...

Costing less to develop than ASML’s most advanced machines, which are priced at more than $350 million, Proud said the results demonstrated by Substrate are comparable to those produced by ASML’s ...

The submicron light sources are realized only by the normal UV photolithography process, enabling the realization of submicron light sources with arbitrary patterns. A novel and efficient method for ...

ASML, the world's largest photolithography equipment manufacturer, has completed its new headquarters in Hwaseong, Gyeonggi ...